Flowchart of the proposed algorithm for speeding up the aerial image simulations in computational lithography. By scaling up the input data appropriately, one can apply the fast Fourier transform (FFT ...
Figure 1： The flowchart of ACDPC iterative reconstruction joint optimization algorithm. (a) ACDPC imaging system based on half-annular illumination. (b) Three annular illumination patterns and their ...
Some results have been hidden because they may be inaccessible to you
Show inaccessible results
Feedback