Business Wire

FSI International Receives U.S. Patent for ViPR™+ Cleaning Technology

MINNEAPOLIS--(BUSINESS WIRE)--FSI International, Inc. (Nasdaq: FSII), a leading supplier of wafer processing, cleaning and surface conditioning equipment for semiconductor manufacturing, announced ...
Business Wire

FSI International Launches the EcoBlend(TM) Process Series of Cost-Effective Dilute Acid Cleaning Solutions for Post-Ash Residue Removal

MINNEAPOLIS--(BUSINESS WIRE)--Aug. 2, 2005--FSI International, Inc. (Nasdaq:FSII) today announced a new family of dilute acid cleans, called the EcoBlend(TM) Processes, for cost-effective and ...
EDN

FSI enters automated wafer cleaning market with 300-mm tool

MINNEAPOLIS — FSI International Inc. here today entered the automated immersion wafer cleaning market with the introduction of a tool for 300-mm wafer fab applications. FSI's tool, dubbed the Magellan ...